Daihen RMN-20K3-V RF Automatic Matcher

دليل المنتج：

Daihen RMN-20K3-V RF Automatic Matcher Product Features
مقدمة: Daihen RMN-20K3-V is a specialized RF automatic matching device for semiconductor equipment, which is compatible with a 2kW RF power supply and can stably adjust the load impedance.
Digital chip control, fast impedance matching response speed
Suitable for 13.56MHz standard RF frequency, precise power matching
Wide impedance adjustment range, suitable for various loads such as etching and thin film
Built in standing wave protection, automatically cuts off RF output in case of abnormal load
Water cooled cooling structure, ارتفاع درجة الحرارة يمكن السيطرة عليها أثناء التشغيل على المدى الطويل
Multiple sets of communication interfaces that can interface with device controllers and upper level systems
Store multiple sets of matching parameters and retrieve process configurations with just one click

Original vacuum adjustable capacitor with low loss and long service life
Whole machine electromagnetic shielding to resist workshop electromagnetic interference
مزود بمؤشر ضوئي للخطأ, تحديد النقاط غير الطبيعية بسرعة
Standard cabinet installation size, easy and effortless disassembly and replacement
Gold plated silver RF connector, with good conductivity and resistance to oxidation
Support automatic/manual dual-mode matching, flexible debugging
Japanese original components, stable operation of 7 × 24-hour production line
Optimize V3 version control program to reduce matching drift issues
خاتمة: Daihen RMN-20K3-V RF automatic matching device reduces RF reflection loss, stabilizes plasma process, and ensures the normal operation of semiconductor production line.

صور مفصلة للمنتج：

RMN-20K3-V

فيديو المنتج

روابط أخرى

502-03362-00 Data Acquisition Module
502-04050-00 Logic I/O Module
501-04569-00 لوحة التحكم

روابط أخرى

وحدة التتابع URRHH
VME172PA-652SE لوحة التحكم الصناعية
هانيويل 05701-أ-0326 جرد بطاقة التحكم