Daihen RMN-20K3-V RF Automatic Matcher
Product Manual：
Daihen RMN-20K3-V RF Automatic Matcher Product Features
Introduction: Daihen RMN-20K3-V is a specialized RF automatic matching device for semiconductor equipment, which is compatible with a 2kW RF power supply and can stably adjust the load impedance.
Digital chip control, fast impedance matching response speed
Suitable for 13.56MHz standard RF frequency, precise power matching
Wide impedance adjustment range, suitable for various loads such as etching and thin film
Built in standing wave protection, automatically cuts off RF output in case of abnormal load
Water cooled cooling structure, controllable temperature rise during long-term operation
Multiple sets of communication interfaces that can interface with device controllers and upper level systems
Store multiple sets of matching parameters and retrieve process configurations with just one click
Original vacuum adjustable capacitor with low loss and long service life
Whole machine electromagnetic shielding to resist workshop electromagnetic interference
Equipped with a fault indicator light, quickly identify abnormal points
Standard cabinet installation size, easy and effortless disassembly and replacement
Gold plated silver RF connector, with good conductivity and resistance to oxidation
Support automatic/manual dual-mode matching, flexible debugging
Japanese original components, stable operation of 7 × 24-hour production line
Optimize V3 version control program to reduce matching drift issues
Conclusion: Daihen RMN-20K3-V RF automatic matching device reduces RF reflection loss, stabilizes plasma process, and ensures the normal operation of semiconductor production line.
Product detailed pictures：
RMN-20K3-V
product video
Other links
502-03362-00 Data Acquisition Module
502-04050-00 Logic I/O Module
501-04569-00 Control Board
Other links
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VME172PA-652SE Industrial control board
HONEYWELL 05701-A-0326 control card Inventory
