Daihen RMN-20K3-V RF Automatic Matcher
Руководство по продукту：
Daihen RMN-20K3-V RF Automatic Matcher Product Features
Введение: Daihen RMN-20K3-V is a specialized RF automatic matching device for semiconductor equipment, which is compatible with a 2kW RF power supply and can stably adjust the load impedance.
Digital chip control, fast impedance matching response speed
Suitable for 13.56MHz standard RF frequency, precise power matching
Wide impedance adjustment range, suitable for various loads such as etching and thin film
Built in standing wave protection, automatically cuts off RF output in case of abnormal load
Water cooled cooling structure, контролируемое повышение температуры при длительной эксплуатации
Multiple sets of communication interfaces that can interface with device controllers and upper level systems
Store multiple sets of matching parameters and retrieve process configurations with just one click
Original vacuum adjustable capacitor with low loss and long service life
Whole machine electromagnetic shielding to resist workshop electromagnetic interference
Оборудован индикатором неисправности., быстро выявить аномальные точки
Standard cabinet installation size, easy and effortless disassembly and replacement
Gold plated silver RF connector, with good conductivity and resistance to oxidation
Support automatic/manual dual-mode matching, гибкая отладка
Japanese original components, stable operation of 7 × 24-hour production line
Optimize V3 version control program to reduce matching drift issues
Заключение: Daihen RMN-20K3-V RF automatic matching device reduces RF reflection loss, stabilizes plasma process, and ensures the normal operation of semiconductor production line.
Подробные фотографии продукта：
RMN-20K3-V
видео о продукте
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