مجموعة الرفع LAM YSC-BSA01038PL
دليل المنتج:
مجموعة الرفع LAM YSC-BSA01038PL
مقدمة: LAM original wafer lifting assembly, used for vertical transfer of wafers in etching machines
Screw precision transmission, high accuracy in lifting and positioning
Dust free sealed structure, suitable for clean process environment
Multiple sets of limit sensors, anti impact protection for wafers
Servo drive, smooth start stop without shaking
Adjustable lifting speed, suitable for different process rhythms
Equipped with vacuum adsorption, the wafer can be picked up and placed without scratching
Complete signal feedback, interface with equipment master control
Multiple safety protections for overload and timeout
Lightweight and compact structure, saving machine space
Wear resistant guiding components, عملية مستقرة على المدى الطويل
Anti particle design reduces chamber pollution
Integrated assembly, easy to disassemble and maintain
Wide temperature stability, supporting 7 × 24-hour continuous operation
Original LAM etching equipment with good compatibility
Fault self check prompt, quickly troubleshoot abnormalities
خاتمة: LAM YSC-BSA01038PL elevator assembly accurately completes wafer lifting and transportation, ensuring stable operation of semiconductor processes
صور مفصلة للمنتج:

YSC-BSA01038PL
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