LAM YSC-BSA01038PL Лифт в сборе
Руководство по продукту:
LAM YSC-BSA01038PL Лифт в сборе
Введение: LAM original wafer lifting assembly, used for vertical transfer of wafers in etching machines
Screw precision transmission, high accuracy in lifting and positioning
Dust free sealed structure, suitable for clean process environment
Multiple sets of limit sensors, anti impact protection for wafers
Servo drive, smooth start stop without shaking
Adjustable lifting speed, suitable for different process rhythms
Equipped with vacuum adsorption, the wafer can be picked up and placed without scratching
Complete signal feedback, interface with equipment master control
Multiple safety protections for overload and timeout
Lightweight and compact structure, saving machine space
Wear resistant guiding components, стабильная длительная работа
Anti particle design reduces chamber pollution
Integrated assembly, easy to disassemble and maintain
Wide temperature stability, поддержка 7 × 24-hour continuous operation
Original LAM etching equipment with good compatibility
Fault self check prompt, quickly troubleshoot abnormalities
Заключение: LAM YSC-BSA01038PL elevator assembly accurately completes wafer lifting and transportation, ensuring stable operation of semiconductor processes
Подробные фотографии продукта:

YSC-BSA01038PL
видео о продукте
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