Adixen ATH1603M Turbomolecular Pump
Product Manual：
Adixen ATH1603M Turbomolecular Pump
1. Magnetic levitation five axis bearing, no mechanical friction loss
2. High pumping speed to meet the requirements of large cavity vacuum technology
3. Water cooling and heat dissipation, suitable for 24-hour continuous operation
4. Support multi posture installation and adapt to narrow spaces of devices
5. Small vibration amplitude, suitable for precision semiconductor equipment
6. Configure gas purging to slow down process gas corrosion
7. Integrated driver unit, supporting remote status monitoring
8. High compression ratio, capable of achieving ultra-high vacuum working conditions
9. Rated speed 39000rpm, quick start stop response
10. Complete self diagnostic function, fault alarm output
11. Compatible with DN200 and DN250 flange interfaces
12. Low operating noise, suitable for use in clean workshops
13. Outstanding hydrogen helium gas extraction capability
14. Need to be used in conjunction with a dry front-end pump as a complete set
15. Suitable for etching, coating, and ion implantation equipment
Adixen ATH1603M turbo molecular pump, magnetic levitation high pumping speed molecular pump, provides stable ultra-high vacuum for semiconductor equipment.
Product detailed pictures：
ATH1603M
product video
Other links
704.910.5 position switch
704.910.4 Contact block strip
CDP312R 64378660G Control Panel
Other links
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