AE 3156310-015 Semiconductor RF Generator

Product Manual：

AE 3156310-015 Semiconductor RF Generator
1. 13.56MHz solid-state RF power output for semiconductor plasma processes
2. 19 inch rack installation, easy disassembly and maintenance of the cabinet
3. Closed loop power control, stable output power due to load fluctuations
4. Detect forward and reflected power, identify load mismatch status
5. Equipped with multiple hardware protections for overvoltage, overcurrent, overheating, and short circuit
6. Supports continuous and pulsed RF output, with adjustable duty cycle
7. Water cooling and heat dissipation, supporting long-term high-power continuous operation
8. The panel can view operational information such as power, fault codes, etc

9. The communication interface supports remote control and data reading from the upper computer
10. Store fault logs for easy traceability and troubleshooting of equipment abnormalities
11. Low harmonic output, reducing electromagnetic interference to surrounding circuits
12. Electrical isolation of signal interface to resist on-site electromagnetic interference
13. Suitable for semiconductor equipment cabinet power supply, stable operation
14. Three proof protection, adapted to high temperature and vibration conditions inside the equipment
15. Need to be paired with an RF matching device to adapt to etching and deposition processes
AE 3156310-015 semiconductor RF generator, plasma RF power source, used in wafer etching, thin film deposition, and plasma cleaning equipment.

Product detailed pictures：

3156310-015

product video

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