AMAT INOI-7134-31-2 Ethernet Port Module
Product Manual：
AMAT INOI-7134-31-2 Ethernet Port Module
Introduction: AMAT INOI-7134-31-2 is a 4-channel DNET pressure control communication module for 300mm semiconductor equipment, integrating Ethernet communication and pneumatic control valves.
Four independent pneumatic control channels, precise control of partitioned vacuum pressure
Standard Ethernet communication port, compatible with the main control system of the device
Built in DNET bus for high-speed data exchange between modules
Integrated valve group, eliminating the need for external pneumatic components
Metal enclosed shell, dust-proof and compatible with dust-free wafer workshop
Real time pressure collection feedback, stable and controllable process pressure
Power on hardware self-test, quickly locate communication/gas path faults
Electrical isolation circuit to resist electromagnetic interference from the cavity
The firmware version can be upgraded online, and maintenance does not require disassembly
Multi channel status indicator lights provide a visual view of channel operation status
Original factory standard interface, directly replace AMAT spare parts of the same series
Multiple protection mechanisms for overvoltage, short circuit, and air circuit overload
Modular layered structure, single channel faults are repaired separately
Suitable for etching and thin film deposition 300mm process chamber
Industrial long-life components reduce production line downtime frequency
Conclusion: The AMAT INOI-7134-31-2 Ethernet port module has stable communication and high integration of pneumatic control, making it the core pressure communication component of semiconductor vacuum equipment.
Product detailed pictures：
INOI-7134-31-2
product video
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