Daihen 3D80-000826-V4 power generator
Product Manual：
3D80-000826-V4 is a 1kW/13.56MHz radio frequency (RF) power generator manufactured by Daihen (Osaka Transformer) for TEL (Tokyo Electronics) in Japan. The model body is RGA-10D-V, specifically designed for semiconductor plasma processes.
core parameters
Model: 3D80-000826-V4 (RGA-10D-V)
Brand: Daihen (Japan)
Type: Solid state RF Generator
Output frequency: 13.56 MHz (industry standard)
Output power: 1000W (1kW), adjustable
Input power supply: three-phase 208VAC, 50/60Hz
Cooling method: air cooling
Application scenarios: semiconductor etching, deposition, plasma cleaning
Weight/Size: Approximately 113kg, standard cabinet style
Main features (15 points)
1kW/13.56MHz standard RF output, compatible with mainstream semiconductor plasma processes.
Daihen’s original solid-state design provides high stability and long lifespan.
TEL OEM number, compatible with TEL equipment, strong compatibility.
Accurate and adjustable power to meet different process window requirements.
Built in frequency automatic locking, anti-interference, high frequency stability.
Integrated overvoltage, overcurrent, overheating, and short circuit protection, safe and reliable.
Air cooled heat dissipation, simple structure, easy maintenance.
Copper exposed heat dissipation with high heat dissipation efficiency.
Standard cabinet installation, compatible with semiconductor production line layout.
Industrial grade wide temperature operation, suitable for clean room environment.
Low harmonic distortion, stable and uniform plasma ignition.
Remote control interface, supporting automation system integration.
Mature mass-produced models, sufficient market spare parts, and convenient maintenance.
Made in Japan, with exquisite craftsmanship and reliable long-term continuous operation.
Compatible with TEL etching/deposition equipment, highly recognized in the semiconductor industry.
Product detailed pictures：
G353-81-S
product video
Other links
SC560 3BSE008105R1监测模块
CI546 3BSE012545R1控制模块
Emerson 1C31222G01控制模块
Other links
GE ENERGY HYDRAN H201Ci-1 Single Channel Controller
CI860K01 3BSE032444R1 power module
GE TB43225AF14 Circuit Breaker
