Daihen 3D80-000826-V4 power generator
دليل المنتج：
3D80-000826-V4 is a 1kW/13.56MHz radio frequency (RF) power generator manufactured by Daihen (Osaka Transformer) for TEL (Tokyo Electronics) in Japan. The model body is RGA-10D-V, specifically designed for semiconductor plasma processes.
المعلمات الأساسية
نموذج: 3D80-000826-V4 (RGA-10D-V)
ماركة: Daihen (Japan)
يكتب: Solid state RF Generator
Output frequency: 13.56 MHz (industry standard)
طاقة الإخراج: 1000دبليو (1kW), adjustable
مدخلات الطاقة: three-phase 208VAC, 50/60Hz
Cooling method: air cooling
سيناريوهات التطبيق: semiconductor etching, ترسيب, plasma cleaning
Weight/Size: Approximately 113kg, standard cabinet style
الميزات الرئيسية (15 نقاط)
1kW/13.56MHz standard RF output, compatible with mainstream semiconductor plasma processes.
Daihen’s original solid-state design provides high stability and long lifespan.
TEL OEM number, compatible with TEL equipment, توافق قوي.
Accurate and adjustable power to meet different process window requirements.
Built in frequency automatic locking, مكافحة التدخل, high frequency stability.
الجهد الزائد المتكامل, التيار الزائد, ارتفاع درجة الحرارة, and short circuit protection, آمنة وموثوقة.
Air cooled heat dissipation, simple structure, صيانة سهلة.
Copper exposed heat dissipation with high heat dissipation efficiency.
Standard cabinet installation, compatible with semiconductor production line layout.
عملية درجة حرارة واسعة من الدرجة الصناعية, مناسبة لبيئة الغرفة النظيفة.
Low harmonic distortion, stable and uniform plasma ignition.
Remote control interface, supporting automation system integration.
Mature mass-produced models, sufficient market spare parts, and convenient maintenance.
Made in Japan, with exquisite craftsmanship and reliable long-term continuous operation.
Compatible with TEL etching/deposition equipment, highly recognized in the semiconductor industry.
صور مفصلة للمنتج：
G353-81-S
فيديو المنتج
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