Daihen 3D80-000826-V4 power generator
Руководство по продукту：
3D80-000826-V4 is a 1kW/13.56MHz radio frequency (RF) power generator manufactured by Daihen (Osaka Transformer) for TEL (Tokyo Electronics) in Japan. The model body is RGA-10D-V, specifically designed for semiconductor plasma processes.
core parameters
Модель: 3D80-000826-V4 (RGA-10D-V)
Brand: Daihen (Japan)
Тип: Solid state RF Generator
Output frequency: 13.56 MHz (industry standard)
Output power: 1000Вт (1kW), adjustable
Input power supply: three-phase 208VAC, 50/60Гц
Cooling method: air cooling
Сценарии применения: semiconductor etching, deposition, plasma cleaning
Weight/Size: Approximately 113kg, standard cabinet style
Основные особенности (15 points)
1kW/13.56MHz standard RF output, compatible with mainstream semiconductor plasma processes.
Daihen’s original solid-state design provides high stability and long lifespan.
TEL OEM number, compatible with TEL equipment, сильная совместимость.
Accurate and adjustable power to meet different process window requirements.
Built in frequency automatic locking, anti-interference, high frequency stability.
Integrated overvoltage, сверхток, перегрев, and short circuit protection, safe and reliable.
Air cooled heat dissipation, simple structure, простота обслуживания.
Copper exposed heat dissipation with high heat dissipation efficiency.
Standard cabinet installation, compatible with semiconductor production line layout.
Industrial grade wide temperature operation, suitable for clean room environment.
Low harmonic distortion, stable and uniform plasma ignition.
Remote control interface, supporting automation system integration.
Mature mass-produced models, sufficient market spare parts, and convenient maintenance.
Made in Japan, with exquisite craftsmanship and reliable long-term continuous operation.
Compatible with TEL etching/deposition equipment, highly recognized in the semiconductor industry.
Подробные фотографии продукта：
G353-81-S
видео о продукте
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