MKS 626B11TDE pressure sensor
Product Manual：
MKS 626B11TDE is a specialized capacitive absolute vacuum pressure sensor for semiconductor equipment, which accurately monitors the vacuum pressure in the cavity.
1. MKS 626B11TDE adopts Inconel alloy membrane, which is resistant to process corrosive gases
2. High measurement accuracy, small reading error, stable and reliable vacuum values
3. Unrestricted by gas type, absolute pressure can be read directly without conversion
4. Fast response speed, fast collection of pressure changes without delay
5. Ultra high resolution, precise capture of small vacuum fluctuations
6. 0-10V standard analog output, compatible with various industrial control acquisition systems
7. ± 15V DC power supply, wiring compatible with industrial general power supply modules
8. NW16 standard KF vacuum interface, easy disassembly and sealing of pipelines
9. 15 pin D-Sub communication connector, stable signal transmission and anti-interference
10. Double layer welded shell, pressure resistant protection, resistant to instantaneous high voltage impact
11. Low temperature drift coefficient, small measurement deviation of workshop temperature change environment
12. Low hysteresis error and strong consistency of measurement data for pressure rise and fall
13. Room temperature type without heating design, low overall power consumption and less likely to generate heat
14. Compact size, easy to install in narrow semiconductor cavities
15. Long term zero drift is small, reducing frequent calibration and maintenance
Conclusion: The MKS 626B11TDE pressure sensor is corrosion-resistant and accurate in pressure measurement. It is a standard vacuum detection component for wafer coating and etching equipment.
Product detailed pictures：
626B11TDE
product video
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