NIKON 4S588-13 Six axis Vibration Measurement Device
Product Manual：
The NIKON 4S588-13 six axis vibration measuring device is a specialized vibration monitoring component for Nikon semiconductor lithography equipment
1 NIKON 4S588-13 standard module size, lithography machine can be directly installed and fixed
Synchronized acquisition of displacement and vibration data with six axes, high-precision detection at the micrometer level
3 built-in isolation sensing circuits to isolate electromagnetic clutter interference in clean workshops
4 three-axis acceleration+three-axis attitude synchronous sampling, real-time capture of micro vibrations
5. Low data transmission delay, fast feedback of abnormal machine vibration signals
6 low-power sensing chips, stable temperature rise control for long-term 24-hour operation
7 wide temperature adaptation lithography cavity high and low temperature process environment, measurement without drift
8 compatible with Nikon series wafer exposure equipment, no additional debugging or modification required
9. Integrated static and surge protection to protect internal precision sensing components
10 integrated compact structure, saving installation space in the narrow interior of the lithography machine
11 supports 24/7 uninterrupted online monitoring of wafer production
12 dustproof sealed shell, suitable for dust-free clean workshop working conditions
13 standardized signal interface, easy disassembly, calibration, and maintenance operation
Real time data analysis of 14 supporting upper computers to predict equipment failures in advance
15 NIKON 4S588-13 matches the original machine parameters perfectly, with high compatibility for replacement
The NIKON 4S588-13 six axis vibration measurement device monitors accurately and stably, and is a core component for repairing and replacing semiconductor lithography equipment
Product detailed pictures：
4S588-13
product video
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