Edwards NR5150000XS Dry Pump
Product Manual：
Edwards NR5150000XS Dry Pump
1. Edwards NR5150000XS oil-free dry vacuum pump
2. Oil free structure to avoid oil pollution in the process chamber
3. Configure gas town function, capable of extracting water vapor and condensable gases
4. High pumping speed, achieving rapid establishment of rough vacuum
5. Built in particle filter to block dust from entering the pump chamber
6. RS485 communication, supports remote monitoring
7. Over temperature and overload protection, fault alarm output
8. Air cooled heat dissipation, suitable for 7 × 24-hour continuous operation
9. Excellent sealing structure to prevent gas backflow
10. Compact structure, convenient for equipment integration and installation
11. Low vibration and low operating noise
12. Long maintenance cycle, reducing operation and maintenance costs
13. Can be used as a front-end pump for turbomolecular pumps
14. Suitable for semiconductor etching and thin film process equipment
15. Edwards NR5150000XS is resistant to corrosive process gases
Edwards NR5150000XS dry pump, a front-end pump for semiconductor vacuum systems, is used to quickly establish rough vacuum in process chambers.
Product detailed pictures：
NR5150000XS
product video
Other links
UAC383AE01 HIEE3008900001 Input Module
UAC389AE02 HIEE30888R0002 Logic Controller
LWN2660-6 converter
Other links
PPC380AE102 HIEE300885R0102 Sequence control module
PPC905AE101 3BHE014070R0101 control module
PPCC322BE HIEE300900R0001 control module
